Microelectromechanical systems advanced materials and fabrication methods /
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| Corporate Authors: | , |
|---|---|
| Formato: | Recurso Electrónico livro electrónico |
| Idioma: | inglês |
| Publicado em: |
Washington, DC :
National Academy Press,
1997.
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| Assuntos: | |
| Acesso em linha: | An electronic book accessible through the World Wide Web; click to view |
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