Atomic layer deposition principles, characteristics, and nanotechnology applications /
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| Main Author: | |
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| Corporate Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hoboken, NJ :
John Wiley & Sons,
c2013.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | xv, 253 p. : ill. |
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| Bibliography: | Includes bibliographical references and index. |