Atomic layer deposition principles, characteristics, and nanotechnology applications /

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Bibliografische gegevens
Hoofdauteur:	Kaariainen, Tommi
Coauteur:	ebrary, Inc
Formaat:	Elektronisch E-boek
Taal:	Engels
Gepubliceerd in:	Hoboken, NJ : John Wiley & Sons, c2013.
Editie:	2nd ed.
Onderwerpen:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Online toegang:	An electronic book accessible through the World Wide Web; click to view
Tags:	Voeg label toe Geen labels, Wees de eerste die dit record labelt!

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