Atomic layer deposition principles, characteristics, and nanotechnology applications /
Guardat en:
| Autor principal: | |
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| Autor corporatiu: | |
| Format: | Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
Hoboken, NJ :
John Wiley & Sons,
c2013.
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| Edició: | 2nd ed. |
| Matèries: | |
| Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
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