Atomic layer deposition principles, characteristics, and nanotechnology applications /

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Dades bibliogràfiques
Autor principal:	Kaariainen, Tommi
Autor corporatiu:	ebrary, Inc
Format:	Electrònic eBook
Idioma:	anglès
Publicat:	Hoboken, NJ : John Wiley & Sons, c2013.
Edició:	2nd ed.
Matèries:	Chemical vapor deposition. Epitaxy. Microelectronics. Nanotechnology. Electronic books.
Accés en línia:	An electronic book accessible through the World Wide Web; click to view
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

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