Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
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| Corporate Author: | |
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| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
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| Series: | Nanotechnology science and technology series.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | xii, 391 p. : ill. (some col.). |
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| Bibliography: | Includes bibliographical references and index. |