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Чикаго-гийн эшлэл (17 дахь хэвлэлт)ebrary, Inc, Britt Ekwall, ба Mikkel Cronquist. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Hauppauge, N.Y.: Nova Science Publishers, 2010.
MLA -ийн эшлэл (9 дэх хэвлэлт)ebrary, Inc, et al. Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications. Nova Science Publishers, 2010.
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