Glancing angle deposition of thin films : engineering the nanoscale /
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| Main Authors: | , , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, England :
Wiley,
2014.
|
| Series: | Wiley series in materials for electronic and optoelectronic applications.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 020 | |z 9781118847565 | ||
| 020 | |a 9781118847329 (e-book) | ||
| 035 | |a (CaPaEBR)ebr10891175 | ||
| 035 | |a (OCoLC)883570105 | ||
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| 050 | 1 | 4 | |a T174.7 |b .H39 2014eb |
| 082 | 0 | 4 | |a 621.3815/2 |2 23 |
| 100 | 1 | |a Hawkeye, Matthew M., |e author. | |
| 245 | 1 | 0 | |a Glancing angle deposition of thin films : |b engineering the nanoscale / |c Matthew M. Hawkeye, Michael T. Taschuk, Michael J. Brett. |
| 264 | 1 | |a Chichester, England : |b Wiley, |c 2014. | |
| 264 | 4 | |c ©2014 | |
| 300 | |a 1 online resource (316 pages) : |b illustrations (some color). | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a Wiley Series in Materials for Electronic and Optoelectronic Applications | |
| 504 | |a Includes bibliographical references at the end of each chapters and index. | ||
| 588 | |a Description based on print version record. | ||
| 590 | |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2015. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Nanotechnology. | |
| 650 | 0 | |a Chemical vapor deposition. | |
| 650 | 0 | |a Nanoelectromechanical systems |x Design and construction. | |
| 655 | 0 | |a Electronic books. | |
| 700 | 1 | |a Taschuk, Michael T., |e author. | |
| 700 | 1 | |a Brett, Michael J., |e author. | |
| 776 | 0 | 8 | |i Print version: |a Hawkeye, Matthew M. |t Glancing angle deposition of thin films : engineering the nanoscale. |d Chichester, England : Wiley, c2014 |h xiv, 299 pages |k Wiley series in materials for electronic and optoelectronic applications. |z 9781118847565 |w 2014013307 |
| 797 | 2 | |a ebrary. | |
| 830 | 0 | |a Wiley series in materials for electronic and optoelectronic applications. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10891175 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 174109 |d 174109 | ||