Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
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| Other Authors: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Zurich, Switzerland :
TTP,
2014.
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| Series: | Advanced materials research ;
Volume 901. |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | 1 online resource (117 pages) : illustrations (some color), graphs, photographs. |
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| Bibliography: | Includes bibliographical references at the end of each chapters and indexes. |
| ISBN: | 9783038264286 (e-book) |
| ISSN: | 1662-8985 ; 1662-8985 |