Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
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| Other Authors: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Zurich, Switzerland :
TTP,
2014.
|
| Series: | Advanced materials research ;
Volume 901. |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 050 | 1 | 4 | |a TK7875 |b .M384 2014eb |
| 082 | 0 | 4 | |a 621.381 |2 23 |
| 245 | 0 | 0 | |a Material science and MEMS production : |b selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China / |c edited by Changhui Liu. |
| 264 | 1 | |a Zurich, Switzerland : |b TTP, |c 2014. | |
| 264 | 4 | |c ©2014 | |
| 300 | |a 1 online resource (117 pages) : |b illustrations (some color), graphs, photographs. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 490 | 1 | |a Advanced Materials Research, |x 1662-8985 ; |v Volume 901 | |
| 504 | |a Includes bibliographical references at the end of each chapters and indexes. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed March 20, 2014). | ||
| 590 | |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems |v Congresses. | |
| 650 | 0 | |a Nanotechnology |v Congresses. | |
| 655 | 0 | |a Electronic books. | |
| 700 | 1 | |a Liu, Changhui, |e editor. | |
| 776 | 0 | 8 | |i Print version: |t Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. |d Zurich, Switzerland : TTP, c2014 |h 120 pages |k Advanced materials research ; Volume 901. |x 1662-8985 |z 9783038350477 |
| 797 | 2 | |a ebrary. | |
| 830 | 0 | |a Advanced materials research ; |v Volume 901. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10846240 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 170518 |d 170518 | ||