Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan /

Bibliographic Details

Corporate Author:	International Conference on Advanced Micro-Device Engineering Kiryū-shi, Japan
Other Authors:	Hosaka, Sumio
Format:	Electronic Conference Proceeding eBook
Language:	English
Published:	Durnten-Zurich, Switzerland : Trans Tech Publications, [2013]
Series:	Key engineering materials ; 534
Subjects:	Microtechnology > Congresses. Mechatronics > Congresses. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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