Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan /
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| Format: | Electronic Conference Proceeding eBook |
| Language: | English |
| Published: |
Durnten-Zurich, Switzerland :
Trans Tech Publications,
[2013]
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| Series: | Key engineering materials ;
534 |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | 1 online resource (277 pages) : illustrations. |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9783038139201 (ebook) |