Advanced micro-device engineering III : selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan /
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|---|---|
| Other Authors: | |
| Format: | Electronic Conference Proceeding eBook |
| Language: | English |
| Published: |
Durnten-Zurich, Switzerland :
Trans Tech Publications,
[2013]
|
| Series: | Key engineering materials ;
534 |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 035 | |a (CaPaEBR)ebr10777794 | ||
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| 040 | |a CaPaEBR |b eng |e rda |e pn |c CaPaEBR | ||
| 050 | 1 | 4 | |a T174.7 |b .I586 2013eb |
| 111 | 2 | |a International Conference on Advanced Micro-Device Engineering |n (3rd : |d 2011 : |c Kiryū-shi, Japan) | |
| 245 | 1 | 0 | |a Advanced micro-device engineering III : |b selected, peer reviewed papers from the 3rd International Conference on Advanced Micro-Device Engineering (AMDE2011), December 8th, 2011, Kiryu City Performing Arts Center, Kiryu, Japan / |c edited by Sumio Hosaka. |
| 264 | 1 | |a Durnten-Zurich, Switzerland : |b Trans Tech Publications, |c [2013] | |
| 264 | 4 | |c ©2013 | |
| 300 | |a 1 online resource (277 pages) : |b illustrations. | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 440 | 0 | |a Key engineering materials ; |v 534 | |
| 504 | |a Includes bibliographical references and indexes. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed October 31, 2013). | ||
| 590 | |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microtechnology |v Congresses. | |
| 650 | 0 | |a Mechatronics |v Congresses. | |
| 655 | 0 | |a Electronic books. | |
| 700 | 1 | |a Hosaka, Sumio. | |
| 797 | 2 | |a ebrary. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10777794 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 164419 |d 164419 | ||