Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
שמור ב:
| Corporate Authors: | , |
|---|---|
| פורמט: | אלקטרוני ספר אלקטרוני |
| שפה: | אנגלית |
| יצא לאור: |
Washington, D.C. :
National Academy Press,
1992.
|
| נושאים: | |
| גישה מקוונת: | An electronic book accessible through the World Wide Web; click to view |
| תגים: |
אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!
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MARC
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| 110 | 2 | |a National Research Council (U.S.). |b Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems. | |
| 245 | 1 | 0 | |a Beam technologies for integrated processing |h [electronic resource] : |b report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
| 260 | |a Washington, D.C. : |b National Academy Press, |c 1992. | ||
| 300 | |a xii, 89 p. : |b ill. | ||
| 500 | |a "NMAB-461." | ||
| 504 | |a Includes bibliographical references. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectronics industry. | |
| 650 | 0 | |a Molecular beams |x Industrial applications. | |
| 650 | 0 | |a Microelectronics |x Materials. | |
| 650 | 0 | |a Plasma-enhanced chemical vapor deposition |x Industrial applications. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10055022 |z An electronic book accessible through the World Wide Web; click to view |
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