Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Dades bibliogràfiques

Autor corporatiu:	National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, ebrary, Inc
Format:	Electrònic eBook
Idioma:	anglès
Publicat:	Washington, D.C. : National Academy Press, 1992.
Matèries:	Microelectronics industry. Molecular beams > Industrial applications. Microelectronics > Materials. Plasma-enhanced chemical vapor deposition > Industrial applications. Electronic books.
Accés en línia:	An electronic book accessible through the World Wide Web; click to view
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