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Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

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Korporace: National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, ebrary, Inc
Médium: Elektronický zdroj E-kniha
Jazyk:angličtina
Vydáno: Washington, D.C. : National Academy Press, 1992.
Témata:
Microelectronics industry.
Molecular beams > Industrial applications.
Microelectronics > Materials.
Plasma-enhanced chemical vapor deposition > Industrial applications.
Electronic books.
On-line přístup:An electronic book accessible through the World Wide Web; click to view
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Popis jednotky:"NMAB-461."
Fyzický popis:xii, 89 p. : ill.
Bibliografie:Includes bibliographical references.

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