MEMS mechanical sensors

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Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Beeby, Stephen
Format:	Electronic eBook
Language:	English
Published:	Boston : Artech House, c2004.
Series:	Microelectromechanical systems series.
Subjects:	Microelectromechanical systems. Detectors. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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008	040308s2004 maua sb 001 0 eng d
010			\|z 2004046158
020			\|z 1580538738
020			\|z 1580535364 (alk. paper)
035			\|a (CaPaEBR)ebr10081990
035			\|a (OCoLC)70733931
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TK7875 \|b .M4537 2004eb
082	0	4	\|a 681/.2 \|2 22
245	0	0	\|a MEMS mechanical sensors \|h [electronic resource] / \|c Stephen Beeby ... [et al.
260			\|a Boston : \|b Artech House, \|c c2004.
300			\|a x, 269 p. : \|b ill.
490	1		\|a Artech House microelectromechanical systems (MEMS) series
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2009. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Microelectromechanical systems.
650		0	\|a Detectors.
655		7	\|a Electronic books. \|2 local
700	1		\|a Beeby, Stephen.
710	2		\|a ebrary, Inc.
830		0	\|a Microelectromechanical systems series.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10081990 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 67535 \|d 67535