MEMS mechanical sensors

MEMS mechanical sensors

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Bibliographic Details
Corporate Author: ebrary, Inc
Other Authors: Beeby, Stephen
Format: Electronic eBook
Language:English
Published: Boston : Artech House, c2004.
Series:Microelectromechanical systems series.
Subjects:
Microelectromechanical systems.
Detectors.
Electronic books.
Online Access:An electronic book accessible through the World Wide Web; click to view
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Description
Physical Description:x, 269 p. : ill.
Bibliography:Includes bibliographical references and index.

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