Understanding MEMS : principles and applications /

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Bibliographic Details
Main Author:	Castañer, Luis (Author)
Format:	Electronic eBook
Language:	English
Published:	West Sussex, England : Wiley, 2016.
Subjects:	Microelectromechanical systems. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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020			\|z 9781119055426
020			\|a 9781119055495 (e-book)
035			\|a (MiAaPQ)ebr11125577
040			\|a MiAaPQ \|b eng \|e rda \|e pn \|c MiAaPQ \|d MiAaPQ
050		4	\|a TK7875 \|b .C37 2016eb
082	0	4	\|a 621.381 \|2 23
100	1		\|a Castañer, Luis, \|e author.
245	1	0	\|a Understanding MEMS : \|b principles and applications / \|c Luis Castañer.
264		1	\|a West Sussex, England : \|b Wiley, \|c 2016.
264		4	\|c ©2016
300			\|a 1 online resource (398 pages) : \|b illustrations
336			\|a text \|2 rdacontent
337			\|a computer \|2 rdamedia
338			\|a online resource \|2 rdacarrier
504			\|a Includes bibliographical references and index.
588			\|a Description based on print version record.
590			\|a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
650		0	\|a Microelectromechanical systems.
655		4	\|a Electronic books.
776	0	8	\|i Print version: \|a Castañer, Luis. \|t Understanding MEMS : principles and applications. \|d West Sussex, England : Wiley, c2016 \|h approximately 398 pages \|z 9781119055426 \|w 2015024280
797	2		\|a ProQuest (Firm)
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=11125577 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 185500 \|d 185500