Understanding MEMS : principles and applications /
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| Main Author: | |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
West Sussex, England :
Wiley,
2016.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | 1 online resource (398 pages) : illustrations |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781119055495 (e-book) |