Ion implantation and activation. Volume 3 /
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Sharjah :
Bentham Science Publishers,
2013.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 005 | 20171002064235.0 | ||
| 006 | m o d | ||
| 007 | cr cn||||||||| | ||
| 008 | 121011s2013 ts a ob 001 1 eng d | ||
| 020 | |a 9781608057924 (ebook) | ||
| 020 | |z 9781608057146 | ||
| 035 | |a (CaPaEBR)ebr10817749 | ||
| 035 | |a (OCoLC)865331807 | ||
| 040 | |a CaPaEBR |b eng |e rda |e pn |c CaPaEBR | ||
| 050 | 1 | 4 | |a QC702.7.I55 |b S89 2013eb |
| 100 | 1 | |a Suzuki, Kunihiro. | |
| 245 | 1 | 0 | |a Ion implantation and activation. |n Volume 3 / |c Kunihiro Suzuki. |
| 264 | 1 | |a Sharjah : |b Bentham Science Publishers, |c 2013. | |
| 300 | |a 1 online resource (212 pages) : |b illustrations | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a computer |2 rdamedia | ||
| 338 | |a online resource |2 rdacarrier | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | |a Description based on online resource; title from PDF title page (ebrary, viewed January 12, 2014). | ||
| 590 | |a Electronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Ion implantation. | |
| 650 | 0 | |a Ion accelerators. | |
| 655 | 0 | |a Electronic books. | |
| 797 | 2 | |a ebrary. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10817749 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 167290 |d 167290 | ||