Ion implantation and activation. Volume 3 /

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Bibliographic Details
Main Author: Suzuki, Kunihiro
Format: Electronic eBook
Language:English
Published: Sharjah : Bentham Science Publishers, 2013.
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Online Access:An electronic book accessible through the World Wide Web; click to view
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Description
Physical Description:1 online resource (212 pages) : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:9781608057924 (ebook)