Tohutoro APA (7th ed.)
ebrary, Inc, Tabata, O., & Tsuchiya, T. (2013). Reliability of MEMS: Testing of materials and devices. Wiley-VCH.
Tohutoru Kātū Chicago (17th ed.)
ebrary, Inc, Osamu Tabata, me Toshiyuki Tsuchiya. Reliability of MEMS: Testing of Materials and Devices. Weinheim: Wiley-VCH, 2013.
Tohutoro MLA (9th ed.)
ebrary, Inc, et al. Reliability of MEMS: Testing of Materials and Devices. Wiley-VCH, 2013.
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