APA (7th ed.) Citation
ebrary, Inc, Tabata, O., & Tsuchiya, T. (2013). Reliability of MEMS: Testing of materials and devices. Wiley-VCH.
Chicago Style (17th ed.) Citation
ebrary, Inc, Osamu Tabata, and Toshiyuki Tsuchiya. Reliability of MEMS: Testing of Materials and Devices. Weinheim: Wiley-VCH, 2013.
MLA (9th ed.) Citation
ebrary, Inc, et al. Reliability of MEMS: Testing of Materials and Devices. Wiley-VCH, 2013.
Warning: These citations may not always be 100% accurate.