ebrary, Inc, Tabata, O., & Tsuchiya, T. (2013). Reliability of MEMS: Testing of materials and devices. Wiley-VCH.
Cita Chicago (17th ed.)ebrary, Inc, Osamu Tabata, i Toshiyuki Tsuchiya. Reliability of MEMS: Testing of Materials and Devices. Weinheim: Wiley-VCH, 2013.
Cita MLA (9th ed.)ebrary, Inc, et al. Reliability of MEMS: Testing of Materials and Devices. Wiley-VCH, 2013.
Atenció: Aquestes cites poden no estar 100% correctes.