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Resonant MEMS : fundamentals, implementation and application /

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Bibliográfalaš dieđut
Eará dahkkit:	Brand, Oliver (Doaimmaheaddji)
Materiálatiipa:	Elektrovnnalaš E-girji
Giella:	eaŋgalasgiella
Almmustuhtton:	Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.
Ráidu:	Advanced micro & nanosystems.
Fáttát:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Liŋkkat:	An electronic book accessible through the World Wide Web; click to view
Fáddágilkorat:	Lasit fáddágilkoriid Eai fáddágilkorat, Lasit vuosttaš fáddágilkora!

Geahča maid

Introduction to microfabrication
Dahkki: Franssila, Sami
Almmustuhtton: (2010)

Materials and failures in MEMS and NEMS /
Almmustuhtton: (2015)

Understanding MEMS : principles and applications /
Dahkki: Castañer, Luis
Almmustuhtton: (2016)

MEMS-based integrated navigation
Dahkki: Aggarwal, Priyanka
Almmustuhtton: (2010)

Reliability of MEMS testing of materials and devices /
Almmustuhtton: (2013)

MEMS mechanical sensors
Almmustuhtton: (2004)

Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
Almmustuhtton: (2010)

Hermeticity testing of MEMS and microelectronic packages /
Dahkki: Costello, Suzanne, et al.
Almmustuhtton: (2013)

MEMS for automotive and aerospace applications /
Almmustuhtton: (2013)

Handbook of silicon based MEMS materials and technologies
Almmustuhtton: (2010)

Analysis and design principles of MEMS devices
Dahkki: Bao, Min-Hang
Almmustuhtton: (2005)

Cost-driven design of smart microsystems
Dahkki: Niedermayer, Michael, 1971-
Almmustuhtton: (2012)

Smart mems and sensor systems
Dahkki: Gaura, Elena
Almmustuhtton: (2006)

Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
Almmustuhtton: (2014)

Inkjet-based micromanufacturing
Almmustuhtton: (2012)

NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /
Almmustuhtton: (2011)

On-chip pretreatment of whole blood by using MEMS technology
Almmustuhtton: (2012)

Digital holography for MEMS and microsystem metrology
Almmustuhtton: (2011)

An introduction to microelectromechanical systems engineering
Dahkki: Maluf, Nadim
Almmustuhtton: (2004)

Silicon carbide micro electromechanical systems for harsh environments
Almmustuhtton: (2006)

Micro, nanosystems, and systems on chips modeling, control, and estimation /
Almmustuhtton: (2010)

Electromechanical and systems engineering : selected, peer reviewed papers from the 5th International Congress of Electromechanical and Systems Engineering, 10th-14th November 2008, National Polytechnic Institute, Mexico City /
Almmustuhtton: (2009)

Integrated microwave front-ends with avionics applications
Dahkki: Maloratsky, Leo G.
Almmustuhtton: (2012)

Lab-on-a-chip techniques, circuits, and biomedical applications /
Dahkki: Ghallab, Yehya H.
Almmustuhtton: (2010)

Microelectromechanical systems advanced materials and fabrication methods /
Almmustuhtton: (1997)

Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /
Almmustuhtton: (2013)

FBAR, MEMS and NEMS resonator design and applications
Dahkki: Campanella, Humberto
Almmustuhtton: (2010)

Practical guide to RF-MEMS
Dahkki: Iannacci, Jacopo
Almmustuhtton: (2013)

Microfabrication for microfluidics
Dahkki: Lee, Sang-Joon John
Almmustuhtton: (2010)

Lithography principles, processes and materials /
Almmustuhtton: (2011)

RF MEMS circuit design for wireless communications
Dahkki: Santos, Héctor J. de los
Almmustuhtton: (2002)

Handbook of wafer bonding
Almmustuhtton: (2012)

Methods in bioengineering biomicrofabrication and biomicrofluidics /
Almmustuhtton: (2010)

Micro-manufacturing design and manufacturing of micro-products /
Almmustuhtton: (2011)

Multifrequency electron paramagnetic resonance : data and techniques /
Almmustuhtton: (2014)

Fundamentals and applications of microfluidics
Dahkki: Nguyen, Nam-Trung, 1970-
Almmustuhtton: (2006)

Magnetic resonance imaging of the brain and spine /
Almmustuhtton: (2009)

Magnetic resonance elastography : physical background and medical applications /
Dahkki: Hirsch, Sebastian, et al.
Almmustuhtton: (2017)

Trends in nano- and micro-cavities
Almmustuhtton: (2011)

Principles of magnetic resonance with examples from ... /
Dahkki: Slichter, Charles P.
Almmustuhtton: (1963)