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Resonant MEMS : fundamentals, implementation and application /

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Detalhes bibliográficos
Outros Autores:	Brand, Oliver (Editor)
Formato:	Recurso Electrónico livro electrónico
Idioma:	inglês
Publicado em:	Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.
Colecção:	Advanced micro & nanosystems.
Assuntos:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Acesso em linha:	An electronic book accessible through the World Wide Web; click to view
Tags:	Adicionar Tag Sem tags, seja o primeiro a adicionar uma tag!

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