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Resonant MEMS : fundamentals, implementation and application /

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Dades bibliogràfiques
Altres autors:	Brand, Oliver (Editor)
Format:	Electrònic eBook
Idioma:	anglès
Publicat:	Weinheim, Baden-Württemberg, Germany : Wiley-VCH, 2015.
Col·lecció:	Advanced micro & nanosystems.
Matèries:	Microelectromechanical systems > Design and construction. Microfabrication. Resonance. Electronic books.
Accés en línia:	An electronic book accessible through the World Wide Web; click to view
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

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