Sputtering materials for VLSI and thin film devices /

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书目详细资料
主要作者:	Sarkar, Jaydeep
格式:	电子电子书
语言:	英语
出版:	Oxford ; Boston : William Andrew Publishing, 2014.
版:	First edition.
主题:	Microelectronics > Materials. Flat panel displays > Materials. Sputtering (Physics) Electronic books.
在线阅读:	An electronic book accessible through the World Wide Web; click to view
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