Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /
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|---|---|
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| Формат: | Электронный ресурс eКнига |
| Язык: | английский |
| Опубликовано: |
Weinheim [Germany] :
Wiley,
2013.
|
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| Online-ссылка: | An electronic book accessible through the World Wide Web; click to view |
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