Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
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主要作者: | Ree, Moonhor |
---|---|
企業作者: | ebrary, Inc |
其他作者: | Yoon, Jinhwan, Heo, Kyuyoung |
格式: | 電子 電子書 |
語言: | 英语 |
出版: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
叢編: | Nanotechnology science and technology series.
|
主題: | |
在線閱讀: | An electronic book accessible through the World Wide Web; click to view |
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