Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
Guardat en:
Autor principal: | Ree, Moonhor |
---|---|
Autor corporatiu: | ebrary, Inc |
Altres autors: | Yoon, Jinhwan, Heo, Kyuyoung |
Format: | Electrònic eBook |
Idioma: | anglès |
Publicat: |
Hauppauge, N.Y. :
Nova Science Publishers,
c2010.
|
Col·lecció: | Nanotechnology science and technology series.
|
Matèries: | |
Accés en línia: | An electronic book accessible through the World Wide Web; click to view |
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