Lithography main techniques /

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...

詳細記述

書誌詳細

団体著者:	ebrary, Inc
その他の著者:	Landis, Stefan
フォーマット:	電子媒体 eBook
言語:	英語
出版事項:	London : Hoboken, N.J. : ISTE ; Wiley, 2011.
主題:	Microlithography. Electronic books.
オンライン･アクセス:	An electronic book accessible through the World Wide Web; click to view
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