Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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