Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
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| 団体著者: | |
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| その他の著者: | |
| フォーマット: | 電子媒体 eBook |
| 言語: | 英語 |
| 出版事項: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| 主題: | |
| オンライン･アクセス: | An electronic book accessible through the World Wide Web; click to view |
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| 要約: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
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| 記述事項: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| 物理的記述: | xxv, 377 p. : ill. (some col.) |
| 書誌: | Includes bibliographical references and index. |