Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
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| Médium: | Elektronický zdroj E-kniha |
| Jazyk: | angličtina |
| Vydáno: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| Témata: | |
| On-line přístup: | An electronic book accessible through the World Wide Web; click to view |
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| Shrnutí: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
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| Popis jednotky: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| Fyzický popis: | xxv, 377 p. : ill. (some col.) |
| Bibliografie: | Includes bibliographical references and index. |