Lithography main techniques /
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
محفوظ في:
| مؤلف مشترك: | |
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| مؤلفون آخرون: | |
| التنسيق: | الكتروني كتاب الكتروني |
| اللغة: | الإنجليزية |
| منشور في: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| الموضوعات: | |
| الوصول للمادة أونلاين: | An electronic book accessible through the World Wide Web; click to view |
| الوسوم: |
إضافة وسم
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| الملخص: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
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| وصف المادة: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
| وصف مادي: | xxv, 377 p. : ill. (some col.) |
| بيبلوغرافيا: | Includes bibliographical references and index. |