Introduction to microfabrication
I tiakina i:
Kaituhi matua: | Franssila, Sami |
---|---|
Kaituhi rangatōpū: | ebrary, Inc |
Hōputu: | Tāhiko īPukapuka |
Reo: | Ingarihi |
I whakaputaina: |
Chichester, West Sussex, England ; Hoboken, NJ :
John Wiley & Sons,
2010.
|
Putanga: | 2nd ed. |
Ngā marau: | |
Urunga tuihono: | An electronic book accessible through the World Wide Web; click to view |
Ngā Tūtohu: |
Tāpirihia he Tūtohu
Kāore He Tūtohu, Me noho koe te mea tuatahi ki te tūtohu i tēnei pūkete!
|
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Ngā tūemi rite
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Resonant MEMS : fundamentals, implementation and application /
I whakaputaina: (2015) -
MEMS for automotive and aerospace applications /
I whakaputaina: (2013) -
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An introduction to microelectromechanical systems engineering
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