Handbook of silicon based MEMS materials and technologies

Micro electro mechanical systems (MEMS) technology, fabrication processes and applications /
Cyhoeddwyd: (2010)

Hermeticity testing of MEMS and microelectronic packages /
gan: Costello, Suzanne, et al.
Cyhoeddwyd: (2013)

MEMS mechanical sensors
Cyhoeddwyd: (2004)

Analysis and design principles of MEMS devices
gan: Bao, Min-Hang
Cyhoeddwyd: (2005)

Smart mems and sensor systems
gan: Gaura, Elena
Cyhoeddwyd: (2006)

Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
Cyhoeddwyd: (2014)

MEMS for automotive and aerospace applications /
Cyhoeddwyd: (2013)

NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /
Cyhoeddwyd: (2011)

Materials and failures in MEMS and NEMS /
Cyhoeddwyd: (2015)

Resonant MEMS : fundamentals, implementation and application /
Cyhoeddwyd: (2015)

On-chip pretreatment of whole blood by using MEMS technology
Cyhoeddwyd: (2012)

An introduction to microelectromechanical systems engineering
gan: Maluf, Nadim
Cyhoeddwyd: (2004)

Micro, nanosystems, and systems on chips modeling, control, and estimation /
Cyhoeddwyd: (2010)

Electromechanical and systems engineering : selected, peer reviewed papers from the 5th International Congress of Electromechanical and Systems Engineering, 10th-14th November 2008, National Polytechnic Institute, Mexico City /
Cyhoeddwyd: (2009)

Digital holography for MEMS and microsystem metrology
Cyhoeddwyd: (2011)

Cost-driven design of smart microsystems
gan: Niedermayer, Michael, 1971-
Cyhoeddwyd: (2012)

Introduction to microfabrication
gan: Franssila, Sami
Cyhoeddwyd: (2010)

Integrated microwave front-ends with avionics applications
gan: Maloratsky, Leo G.
Cyhoeddwyd: (2012)

Lab-on-a-chip techniques, circuits, and biomedical applications /
gan: Ghallab, Yehya H.
Cyhoeddwyd: (2010)

Enabling technologies for MEMS and nanodevices advanced micro and nanosystems /
Cyhoeddwyd: (2013)

Microelectromechanical systems advanced materials and fabrication methods /
Cyhoeddwyd: (1997)

Practical guide to RF-MEMS
gan: Iannacci, Jacopo
Cyhoeddwyd: (2013)

Trends in nano- and micro-cavities
Cyhoeddwyd: (2011)

RF MEMS circuit design for wireless communications
gan: Santos, Héctor J. de los
Cyhoeddwyd: (2002)

Introduction to microelectromechanical microwave systems
gan: Santos, Héctor J. de los
Cyhoeddwyd: (2004)

Microdevices in biology and medicine
Cyhoeddwyd: (2009)

Introduction to microfluidics
gan: Tabeling, P.
Cyhoeddwyd: (2005)

Fundamentals and applications of microfluidics
gan: Nguyen, Nam-Trung, 1970-
Cyhoeddwyd: (2006)

Mechatronics for safety, security and dependability in a new era
Cyhoeddwyd: (2007)

Single-electron devices and circuits in silicon
gan: Durrani, Zahid Ali Khan
Cyhoeddwyd: (2010)

Silicon carbide power devices
gan: Baliga, B. Jayant, 1948-
Cyhoeddwyd: (2005)

Inkjet-based micromanufacturing
Cyhoeddwyd: (2012)

Handbook of wafer bonding
Cyhoeddwyd: (2012)

SiC materials and devices
Cyhoeddwyd: (2007)

SiC materials and devices.
Cyhoeddwyd: (2006)

Disclosing materials at the nanoscale : proceedings of the International Symposium "Disclosing Materials at the Nanoscale" of CIMTEC 2006 - 11th International Ceramics Congress and 4th Forum on New Materials, held in Acireale, Sicily, Italy on June 4-9, 2006 /
Cyhoeddwyd: (2006)