Chemical vapor deposition

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Bibliographic Details
Corporate Author:	ebrary, Inc
Other Authors:	Park, Jong-Hee, 1951-, Sudarshan, T. S., 1955-
Format:	Electronic eBook
Language:	English
Published:	Materials Park, Ohio : ASM International, 2001.
Series:	Surface engineering series ; v. 2.
Subjects:	Vapor-plating. Refractory coating. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
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020			\|z 0871707314
035			\|a (CaPaEBR)ebr10323519
035			\|a (OCoLC)646817910
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TS695 \|b .C52 2001eb
082	0	4	\|a 671.7/35 \|2 21
245	0	0	\|a Chemical vapor deposition \|h [electronic resource] / \|c edited by Jong-Hee Park, T.S. Sudarshan.
260			\|a Materials Park, Ohio : \|b ASM International, \|c 2001.
300			\|a vii, 481 p. : \|b ill.
490	1		\|a Surface engineering series ; \|v v. 2
504			\|a Includes bibliographical references.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2013. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Vapor-plating.
650		0	\|a Refractory coating.
655		7	\|a Electronic books. \|2 local
700	1		\|a Park, Jong-Hee, \|d 1951-
700	1		\|a Sudarshan, T. S., \|d 1955-
710	2		\|a ebrary, Inc.
830		0	\|a Surface engineering series ; \|v v. 2.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10323519 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 101638 \|d 101638