Chemical vapor deposition
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Corporate Author: | |
---|---|
Other Authors: | , |
Format: | Electronic eBook |
Language: | English |
Published: |
Materials Park, Ohio :
ASM International,
2001.
|
Series: | Surface engineering series ;
v. 2. |
Subjects: | |
Online Access: | An electronic book accessible through the World Wide Web; click to view |
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MARC
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007 | cr cn||||||||| | ||
008 | 010221s2001 ohua sb 000 0 eng d | ||
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020 | |z 0871707314 | ||
035 | |a (CaPaEBR)ebr10323519 | ||
035 | |a (OCoLC)646817910 | ||
040 | |a CaPaEBR |c CaPaEBR | ||
050 | 1 | 4 | |a TS695 |b .C52 2001eb |
082 | 0 | 4 | |a 671.7/35 |2 21 |
245 | 0 | 0 | |a Chemical vapor deposition |h [electronic resource] / |c edited by Jong-Hee Park, T.S. Sudarshan. |
260 | |a Materials Park, Ohio : |b ASM International, |c 2001. | ||
300 | |a vii, 481 p. : |b ill. | ||
490 | 1 | |a Surface engineering series ; |v v. 2 | |
504 | |a Includes bibliographical references. | ||
533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2013. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
650 | 0 | |a Vapor-plating. | |
650 | 0 | |a Refractory coating. | |
655 | 7 | |a Electronic books. |2 local | |
700 | 1 | |a Park, Jong-Hee, |d 1951- | |
700 | 1 | |a Sudarshan, T. S., |d 1955- | |
710 | 2 | |a ebrary, Inc. | |
830 | 0 | |a Surface engineering series ; |v v. 2. | |
856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10323519 |z An electronic book accessible through the World Wide Web; click to view |
908 | |a 170314 | ||
942 | 0 | 0 | |c EB |
999 | |c 101638 |d 101638 |