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Fundamental principles of optical lithography the science of microfabrication /

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Detalles Bibliográficos
Autor Principal:	Mack, Chris A.
Autor Corporativo:	ebrary, Inc
Formato:	Electrónico eBook
Idioma:	inglés
Publicado:	Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.
Subjects:	Integrated circuits > Design and construction. Microlithography > Industrial applications. Electronic books.
Acceso en liña:	An electronic book accessible through the World Wide Web; click to view
Tags:	Engadir etiqueta Sen Etiquetas, Sexa o primeiro en etiquetar este rexistro!

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