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Fundamental principles of optical lithography the science of microfabrication /

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Dades bibliogràfiques
Autor principal:	Mack, Chris A.
Autor corporatiu:	ebrary, Inc
Format:	Electrònic eBook
Idioma:	anglès
Publicat:	Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007.
Matèries:	Integrated circuits > Design and construction. Microlithography > Industrial applications. Electronic books.
Accés en línia:	An electronic book accessible through the World Wide Web; click to view
Etiquetes:	Afegir etiqueta Sense etiquetes, Sigues el primer a etiquetar aquest registre!

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