Silicon carbide micro electromechanical systems for harsh environments
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|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
London :
Imperial College Press,
c2006.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 005 | 20171002054941.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 060906s2006 enka sb 000 0 eng d | ||
| 020 | |z 9781860946240 | ||
| 020 | |z 9781860949098 | ||
| 020 | |z 1860946240 | ||
| 035 | |a (CaPaEBR)ebr10201168 | ||
| 035 | |a (OCoLC)560445767 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 050 | 1 | 4 | |a TK7875 |b .S55 2006eb |
| 245 | 0 | 0 | |a Silicon carbide micro electromechanical systems for harsh environments |h [electronic resource] / |c editor Rebecca Cheung. |
| 246 | 3 | |a Silicon carbide microelectromechanical systems for harsh environments | |
| 260 | |a London : |b Imperial College Press, |c c2006. | ||
| 300 | |a x, 181 p. : |b ill. | ||
| 504 | |a Includes bibliographical references. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2009. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Silicon carbide. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Cheung, Rebecca. | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10201168 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
| 942 | 0 | 0 | |c EB |
| 999 | |c 85275 |d 85275 | ||