Nanofabrication using focused ion and electron beams principles and applications /
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| Corporate Author: | |
|---|---|
| Other Authors: | , , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford ; New York :
Oxford University Press,
2011.
|
| Series: | Nanomanufacturing series ;
v. 1 |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 001 | ebr10532647 | ||
| 003 | CaPaEBR | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 110808s2011 enk s 000 0 eng d | ||
| 010 | |z 2011028174 | ||
| 020 | |z 9780199734214 | ||
| 020 | |z 9780199920990 | ||
| 040 | |a CaPaEBR |c CaPaEBR | ||
| 035 | |a (OCoLC)777268040 | ||
| 050 | 1 | 4 | |a TA418.9.N35 |b N2525 2011eb |
| 082 | 0 | 4 | |a 620.1/15 |2 23 |
| 245 | 0 | 0 | |a Nanofabrication using focused ion and electron beams |h [electronic resource] : |b principles and applications / |c edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell. |
| 260 | |a Oxford ; |a New York : |b Oxford University Press, |c 2011. | ||
| 300 | |a xvi, 813 p. | ||
| 490 | 0 | |a Nanomanufacturing series ; |v v. 1 | |
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2011. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Nanostructured materials. | |
| 650 | 0 | |a Nanotechnology. | |
| 650 | 0 | |a Electron beams |x Industrial applications. | |
| 650 | 0 | |a Ion bombardment |x Industrial applications. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 700 | 1 | |a Utke, Ivo. | |
| 700 | 1 | |a Moshkalev, Stanislav. | |
| 700 | 1 | |a Russell, Phillip, |d 1955- | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10532647 |z An electronic book accessible through the World Wide Web; click to view |
| 999 | |c 192357 |d 192357 | ||