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Precursors and defect control for halogenated CVD of thick SiC epitaxial layers /

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书目详细资料
主要作者:	Yazdanfar, Milan (Author)
格式:	电子电子书
语言:	英语
出版:	Linkoping, Sweden : Linkoping University, 2014.
丛编:	Linkoping studies in science and technology. Dissertations ; Number 1625.
主题:	Silicon carbide > Research. Electronic books.
在线阅读:	Click to View
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