High resolution 3D nanoimprint technology template fabrication, application in Fabry-Perot-filter-based nanospectrometers /

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Bibliographic Details
Main Author: Wang, Xiaolin
Corporate Author: ProQuest (Firm)
Format: Thesis Electronic eBook
Language:English
Published: Kassel [Germany] : Kassel University Press, 2011.
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Description
Item Description:Summary in German.
Physical Description:iii, 160 p. : ill. (chiefly col.)
Bibliography:Includes bibliographical references.