High resolution 3D nanoimprint technology template fabrication, application in Fabry-Perot-filter-based nanospectrometers /
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| 第一著者: | |
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| 団体著者: | |
| フォーマット: | 学位論文 電子媒体 eBook |
| 言語: | 英語 |
| 出版事項: |
Kassel [Germany] :
Kassel University Press,
2011.
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| オンライン･アクセス: | Click to View |
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