Capacitive silicon resonators : performance enhancement methods /
"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and de...
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| Main Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press/Taylor & Francis Group,
[2020]
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| Subjects: | |
| Online Access: | Taylor & Francis OCLC metadata license agreement |
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| 100 | 1 | |a Toan, Nguyen Van, |e author. |9 41231 | |
| 245 | 1 | 0 | |a Capacitive silicon resonators : |b performance enhancement methods / |c Nguyen Van Toan and Takahito Ono. |
| 264 | 1 | |a Boca Raton, FL : |b CRC Press/Taylor & Francis Group, |c [2020] | |
| 300 | |a 1 online resource. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 520 | |a "Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"-- |c Provided by publisher. | ||
| 588 | |a OCLC-licensed vendor bibliographic record. | ||
| 650 | 0 | |a Dielectric resonators. |9 41232 | |
| 650 | 0 | |a Electric resonators. |9 41233 | |
| 650 | 0 | |a Nanoelectromechanical systems. |9 41234 | |
| 650 | 0 | |a Semiconductors. |9 41235 | |
| 650 | 7 | |a TECHNOLOGY / Electricity |2 bisacsh |9 41236 | |
| 650 | 7 | |a TECHNOLOGY / Electronics / Circuits / General |2 bisacsh |9 41237 | |
| 650 | 7 | |a TECHNOLOGY / Electronics / Microelectronics |2 bisacsh |9 41238 | |
| 700 | 1 | |a Ono, Takahito, |e author. |9 41239 | |
| 856 | 4 | 0 | |3 Taylor & Francis |u https://www.taylorfrancis.com/books/9780429266010 |
| 856 | 4 | 2 | |3 OCLC metadata license agreement |u http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf |
| 999 | |c 208526 |d 208525 | ||
Capacitive silicon resonators : performance enhancement methods /