Capacitive silicon resonators : performance enhancement methods /

Capacitive silicon resonators : performance enhancement methods /

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"Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and de...

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Bibliographic Details
Main Authors: Toan, Nguyen Van (Author), Ono, Takahito (Author)
Format: Electronic eBook
Language:English
Published: Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020]
Subjects:
Dielectric resonators.
Electric resonators.
Nanoelectromechanical systems.
Semiconductors.
TECHNOLOGY / Electricity
TECHNOLOGY / Electronics / Circuits / General
TECHNOLOGY / Electronics / Microelectronics
Online Access:Taylor & Francis
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