Low energy ion assisted film growth
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| Main Author: | |
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| Corporate Author: | |
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
London : Singapore ; River Edge, NJ :
Imperial College Press ; Distributed by World Scientific,
c2003.
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| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | xiv, 283 p. : ill. |
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| Bibliography: | Includes bibliographical references and index. |