Analysis and design principles of MEMS devices
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| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam ; Oxford :
Elsevier,
c2005.
|
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| 100 | 1 | |a Bao, Min-Hang. | |
| 245 | 1 | 0 | |a Analysis and design principles of MEMS devices |h [electronic resource] / |c by Minhang Bao. |
| 260 | |a Amsterdam ; |a Oxford : |b Elsevier, |c c2005. | ||
| 300 | |a xii, 312 p. : |b ill. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 533 | |a Electronic reproduction. |b Palo Alto, Calif. : |c ebrary, |d 2009. |n Available via World Wide Web. |n Access may be limited to ebrary affiliated libraries. | ||
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 0 | |a Microtechnology. | |
| 655 | 7 | |a Electronic books. |2 local | |
| 710 | 2 | |a ebrary, Inc. | |
| 856 | 4 | 0 | |u http://site.ebrary.com/lib/daystar/Doc?id=10138376 |z An electronic book accessible through the World Wide Web; click to view |
| 908 | |a 170314 | ||
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| 999 | |c 75059 |d 75059 | ||