Analysis and design principles of MEMS devices

Saved in:

Bibliographic Details
Main Author:	Bao, Min-Hang
Corporate Author:	ebrary, Inc
Format:	Electronic eBook
Language:	English
Published:	Amsterdam ; Oxford : Elsevier, c2005.
Subjects:	Microelectromechanical systems. Microtechnology. Electronic books.
Online Access:	An electronic book accessible through the World Wide Web; click to view
Tags:	Add Tag No Tags, Be the first to tag this record!

MARC


LEADER	00000nam a2200000Ia 4500
001	0000085902
005	20171002054342.0
006	m u
007	cr cn\|\|\|\|\|\|\|\|\|
008	050214s2005 ne a fsb 001 0 eng d
015			\|a GBA515718 \|2 bnb
020			\|z 0444516166 (hbk.)
020			\|z 008045562X
035			\|a (CaPaEBR)ebr10138376
035			\|a (OCoLC)162130017
040			\|a CaPaEBR \|c CaPaEBR
050	1	4	\|a TK7875 \|b .B36 2005eb
082	0	4	\|a 621.381 \|2 22
100	1		\|a Bao, Min-Hang.
245	1	0	\|a Analysis and design principles of MEMS devices \|h [electronic resource] / \|c by Minhang Bao.
260			\|a Amsterdam ; \|a Oxford : \|b Elsevier, \|c c2005.
300			\|a xii, 312 p. : \|b ill.
504			\|a Includes bibliographical references and index.
533			\|a Electronic reproduction. \|b Palo Alto, Calif. : \|c ebrary, \|d 2009. \|n Available via World Wide Web. \|n Access may be limited to ebrary affiliated libraries.
650		0	\|a Microelectromechanical systems.
650		0	\|a Microtechnology.
655		7	\|a Electronic books. \|2 local
710	2		\|a ebrary, Inc.
856	4	0	\|u http://site.ebrary.com/lib/daystar/Doc?id=10138376 \|z An electronic book accessible through the World Wide Web; click to view
908			\|a 170314
942	0	0	\|c EB
999			\|c 75059 \|d 75059