Nanofabrication using focused ion and electron beams principles and applications /
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| Corporate Author: | |
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| Other Authors: | , , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford ; New York :
Oxford University Press,
2011.
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| Series: | Nanomanufacturing series ;
v. 1 |
| Subjects: | |
| Online Access: | An electronic book accessible through the World Wide Web; click to view |
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| Physical Description: | xvi, 813 p. |
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