Handbook of 3D integration. Volume 3, 3D process technology /

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Bibliographic Details
Other Authors: Garrou, Philip (Editor), Koyanagi, Mitsumasa (Editor), Ramm, Peter (Editor), Allen, Ricky (Contributor)
Format: Electronic eBook
Language:English
Published: Weinheim, Germany : Wiley-VCH, 2014.
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Online Access:An electronic book accessible through the World Wide Web; click to view
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