Reliability of MEMS testing of materials and devices /
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| Соавтор: | |
|---|---|
| Другие авторы: | , |
| Формат: | Электронный ресурс eКнига |
| Язык: | английский |
| Опубликовано: |
Weinheim :
Wiley-VCH,
2013.
|
| Серии: | Advanced micro & nanosystems.
|
| Предметы: | |
| Online-ссылка: | An electronic book accessible through the World Wide Web; click to view |
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